Synthesis and Characterization of Ni/Si Nanowires for Electrical Transport

نویسندگان

  • Jae Ho Lee
  • Michael Carpenter
  • Eric Eisenbraun
  • Yongqiang Xue
  • Robert Geer
چکیده

Self-assembled Si nanowires (SiNWs) have been synthesized and characterized as a template for surface metal silicide formation to investigate confinement of electron transport at the nanowire surface. The SiNWs with diameters ranging from 5 to 180 nm were synthesized via the solid-liquid-solid (SLS) mechanism with a sputtered Au film as catalyst. Post-deposition thermal processing was carried out for silicide formation. Metal-silicide coated wires were dispensed on metal-patterned Si wafers to carry out two-point and four-point electrical conductivity measurements. Electrical contacts were formed via FIBbased Pt deposition. Metal-silicide-coated SiNWs exhibited an improvement in electrical conductivity of several orders of magnitude. Preliminary analyses imply variable thickness of the metal silicide region based, in part, on deposition methodology and thermal process parameters.

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تاریخ انتشار 2008